Semiconductor multi-gate transistor with respect to architecture, design rule, process, simulation methodology, performance as well as reliability with performance degradation, aging and self-recovery
To improve semiconductor transistor off current, power and driving control, many technologies are using or developing multi-gate transistors such as the FINFET or TRIGATE transistor. Although most of the materials are the same as that used in planar transistors, due to its relatively new architecture, many new areas with this new structure need to be researched to fully understand its concerned items listed above.
Semiconductor transistors off currents have increased as technology scales. This is due to the scaling of threshold voltages to improve performance as the Vdd has scaled. To reduce the off current, semiconductor technologies have implemented or are developing mult-gate transistors for better off current control.
This technology change is a major structural change in the transistor. This can introduce many potential applications and challenges. Examples are:
Constraints and other information:
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